다공질정압공기 Bearing을 이용한 고정도 회전 Table의 성능

The Performance of High-Precision Rotary Table Using Externally Pressurized Porous Gas Bearing

The porous matterials are used both to control the flow of the compressed gas and to serve as the bearing surface. This porous design offers several advantages over the conventional externally pressurized gas bearings. It can simplify the construction, lower the gas consumption, and make the cleaning of the gas supply less critical. Test apparatus was cinstructed to experi- mentally investigate maximum load capacity of thrust bearing was measured 200 Kg (15Kg/$\mu$m), and radial bearing was 36 Kg/$\mu$m. And a rotation accuracy of face waving was 0.0127$\mu$m, and center waving was measured 0.5 $\mu$m. Finally, the use of this method of design and manufacturing will contribute to many practical application in the field required for precision and high stability.