Journal of Surface Science and Engineering (한국표면공학회지)
- Volume 15 Issue 4
- /
- Pages.208-217
- /
- 1982
- /
- 1225-8024(pISSN)
- /
- 2288-8403(eISSN)
Study on the Tic Coating of Steel by C.V.D. Process
CVD법에 의한 강의 TiC 피복에 관하여
Abstract
To study the effect of TiC coating on weight change, microhardness, wear and heat - resistance of TiC layer, chemical vapour deposition on the various substrates has been carried out with the gaseous mixture of TiCl4, toluene, and H2 in the temperature range of 900 - 1000
Keywords