Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 15 Issue 3
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- Pages.138-145
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- 1982
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
The Chemical Vapor Deposition of TiN on Cemented Tungsten Carbide Cutting Tools
초연합금절단공구상에 TiN의 화학증착피막에 관한 연구
Abstract
The effects of the simultaneous variations of the ratio of feed gases(H2/N2 Flow ratio), feed gas flow rate (H2/N2, total-flow rate) and partial pressures of TiCl4 (PTiCl41) as well as deposition time and cobalt content of the substrate on the deposition rate of the TiN Coated Cemented Tungsten Carbide Tools were investigated. Deposition was carried out in the temperature range of 930
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