Oxidation Mechanism of $Si_3N_4$

$Si_3N_4$의 산화반응 기구

  • 이홍림 (연세대학교 공과대학 요업공학과) ;
  • 최태운 (연세대학교 공과대학 요업공학과) ;
  • 김종우 (연세대학교 공과대학 요업공학과)
  • Published : 1980.04.01

Abstract

The oxidation mechanism of the not sintered pellets and sintered bodies of $Si_3N_4$ was investigated. in air over the temperature range of 800~130$0^{\circ}C$. The $\beta$-cristobalite was instantaneously formed and covered the particles of powder packed in the not sintered and weakly sintered porous $Si_3N_4$ bodies by molecular diffusion of oxygen through the porous Si3N4 bodies and an immediate oxidation. The diffusion of oxygen ion through the formed $\beta$-cristobalite surface layer is assumed to control the further oxidation of the $Si_3N_4$ particles of the porous $Si_3N_4$ bodies. The diffusion coefficients and activation energies of oxygen ion through the $\beta$-cristobalite layer were obtained by the use of a derived equation.

Keywords

References

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