대한전자공학회논문지 (Journal of the Korean Institute of Telematics and Electronics)
- 제11권3호
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- Pages.22-26
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- 1974
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- 1016-135X(pISSN)
p-n 접합에 있어서의 비등방성 응력효과
Anisotropic stress Effects in p-n junction
초록
The effects of anisotropic mechanical stress applied normal to the surface of p-n junctions have been investigated. As the stress increased, the breakdown voltage was decreased and the breakdown mode became softer. Within a certain limitation in the applied stress, the above phenomena werw reversibbe, though relaxation and hysteresis phenomena were observed. The time constant of relaxation depended upon the shape of the stressing tip, but for the given tip and device a unique time constant was obtained. The stress.dependence of breakdown voltage showed a good linearity up to about 3.0
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