10kV 고 반복률 펄스 전원장치

10kV High Repetitive Pulsed Power Generator

In this paper, 10kV solid-state pulsed power modulator with high repetition rate is described. The modulator is based on a Marx generator that charges capacitors in parallel and discharges them in series. Twelve IGBTs and capacitors are connected in series to generate output voltages up to 10kV at a repetition rate of 100kHz. The volume of the modulator is 26.1 liters, and its maximum average output power is 10kW. Therefore, the compact design is achieved with a high power density of 380 W/L. Finally, it is confirmed that the pulsed power modulator can operate stably through the experiment results at 10kV 100kHz condition.