한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)
- 한국정보통신학회 2017년도 춘계학술대회
- /
- Pages.529-530
- /
- 2017
Junctionless FET로 구성된 적층형 3차원 인버터의 AC 특성에 대한 연구
AC Electrical Coupling of Monolithic 3D Inverter Consisting of Junctionless FET
- Kim, Kyung-won (Dept. of Electrical, Electronic and Control Eng., Hankyong National University) ;
- Ahn, Tae-Jun (Dept. of Electrical, Electronic and Control Eng., Hankyong National University) ;
- Yu, Yun Seop (Dept. of Electrical, Electronic and Control Eng., Hankyong National University)
- 발행 : 2017.05.31
초록
Junctionless FET(JLFET)로 구성된 적층형 3차원 인버터의 전기적 상호작용을 연구하였다. Inter Layer Dielectirc (ILD) 두께에 따른 상단 JLFET의
Electrical coupling of monolithic 3D inverter(M3D-INV) consisting of Junctionless FET(JLFET) was investigated. Depending on the thickness of Inter Layer Dielectirc (ILD) between top and bottom JLFETs,