한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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- Pages.411.1-411.1
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- 2016
Improving the dielectric reliability using boron doping on solution-processed aluminum oxide
- Kim, Hyunwoo (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Lee, Nayoung (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Choi, Byoungdeog (College of Information and Communication Engineering, Sungkyunkwan University)
- 발행 : 2016.02.17
초록
In this study, we examined the effects of boron doping on the dielectric reliability of solution processed aluminum oxide (