Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2016.02a
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- Pages.411.1-411.1
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- 2016
Improving the dielectric reliability using boron doping on solution-processed aluminum oxide
- Kim, Hyunwoo (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Lee, Nayoung (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Choi, Byoungdeog (College of Information and Communication Engineering, Sungkyunkwan University)
- Published : 2016.02.17
Abstract
In this study, we examined the effects of boron doping on the dielectric reliability of solution processed aluminum oxide (