한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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- Pages.296-296
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- 2016
Highly conductive and transparent ITO:Zr films for amorphous/crystalline silicon heterojnction solar cell
- Kim, Yongjun (School of Information and Communication Engineering, SungKyunKwan University) ;
- Hussain, Shahzada Quamar (School of Information and Communication Engineering, SungKyunKwan University) ;
- Kim, Sunbo (Department of Energy Science, SungKyunKwan University) ;
- Yi, Junsin (School of Information and Communication Engineering, SungKyunKwan University)
- 발행 : 2016.02.17
초록
ITO films doped with a small amount of high-permittivity materials not only retain the basic properties of ITO films but also improve some of their properties. We report the highly conductive and transparent (ITO:Zr) films with various substrate (RT to 300oC) temperatures on glass substrate for the HIT solar cell applications. We observed a decrease in sheet resistance from 36 to