한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2015년도 추계학술대회 논문집
- /
- Pages.183-183
- /
- 2015
실시간 고속 플라즈마 아킹 검출에 대한 연구
Case Study of High-speed Real-time Plasma Arc Detection
초록
Arc in plasma processing chamber results in high current discharge marks and particles on wafers, but it is hard to identify or observe it during the proc ess. In this paper, we report the observations of plasma arc s during various plasma proc esses through a non-invasive optic al plasma monitoring system (OPMS) devised for the in-situ detec tion of abnormal discharge.
키워드