한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2015년도 춘계학술대회 논문집
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- Pages.38-38
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- 2015
Post etch process using CO/NH3 and Reactive Ion Beam for STT-MRAM device
- Park, Seong-U ;
- Yang, Gyeong-Chae ;
- Jeon, Min-Hwan (SKKU Advanced Institute of Nano Technology (SAINT))
- 발행 : 2015.05.07