Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 2015.11a
  • /
  • Pages.182-182
  • /
  • 2015
  • /
  • 2233-9485(pISSN)
  • /
  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
권호 표지

Design and Analysis of Permanent Magnet Array for Development of Large Area Magnetron Sputtering Sources

  • Lee, Ye-Lim (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
  • Kuchi, Rambabu (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
  • Surabhi, Srivathsava (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
  • You, Shin-Jae (Department of Physics, Chungnam National University) ;
  • Jeong, Jong-Ryul (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University)
  • Published : 2015.11.25
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