Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2015.07a
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- Pages.1140-1140
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- 2015
C-V Characteristics of MIM Thin Film with Annealing Conditions
열처리조건에 따른 MIM 박막의 Capacitance-Voltage 특성
- Kim, Jin-Sa (Chosun College of Science & Technology) ;
- Choi, Young-Il (Chosun College of Science & Technology) ;
- Song, Min-Jong (Gwanju Health College University) ;
- Shin, Cheol-Gi (Bucheon University) ;
- Choi, Woon-Shik (Sehan University)
- Published : 2015.07.15
Abstract
In this paper, the MIM thin films were deposited on Si substrate by sputtering method. And MIM thin films were annealed at
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