Proceedings of the Korea Information Processing Society Conference (한국정보처리학회:학술대회논문집)
- 2015.10a
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- Pages.1509-1511
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- 2015
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- 2005-0011(pISSN)
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- 2671-7298(eISSN)
DOI QR Code
A study on Practical Defect Detector using Efficient Thresholding Method
- Pak, Myeongsuk (Department of Electrical, Electronic and Control Engineering, Hankyong National University) ;
- Truong, Mai Thanh Nhat (Department of Electrical, Electronic and Control Engineering, Hankyong National University) ;
- Kim, Sanghoon (Department of Electrical, Electronic and Control Engineering, Hankyong National University)
- Published : 2015.10.28
Abstract
Defect detection is one of the most challenging problems in industrial quality control. In this study we developed a vision-based defect detection system for wafer production. To achieve high-accuracy detection, Otsu method was improved so that it can handle both unimodal and bimodal distributions. After thresholding, detected defect regions in the wafer are classified and grouped into user-defined defect categories. The experimental result has proved the efficiency of our system.
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