한국정보처리학회:학술대회논문집 (Proceedings of the Korea Information Processing Society Conference)

한국정보처리학회 (Korea Information Processing Society)
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A study on Practical Defect Detector using Efficient Thresholding Method

  • Pak, Myeongsuk (Department of Electrical, Electronic and Control Engineering, Hankyong National University) ;
  • Truong, Mai Thanh Nhat (Department of Electrical, Electronic and Control Engineering, Hankyong National University) ;
  • Kim, Sanghoon (Department of Electrical, Electronic and Control Engineering, Hankyong National University)
  • 발행 : 2015.10.28
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초록

Defect detection is one of the most challenging problems in industrial quality control. In this study we developed a vision-based defect detection system for wafer production. To achieve high-accuracy detection, Otsu method was improved so that it can handle both unimodal and bimodal distributions. After thresholding, detected defect regions in the wafer are classified and grouped into user-defined defect categories. The experimental result has proved the efficiency of our system.

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