한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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- Pages.171.1-171.1
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- 2015
Fabrication of carbon nanotube electron beam (C-beam) for thin film modification
- Kang, Jung Su (Department of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Lee, Su Woong (Department of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Lee, Ha Rim (Department of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Chung, Min Tae (Department of Information Display and Advanced Display Research Center, Kyung Hee University) ;
- Park, Kyu Chang (Department of Information Display and Advanced Display Research Center, Kyung Hee University)
- 발행 : 2015.08.24
초록
Carbon nanotube emitters is very promising electron emitter for electron beam applications. We introduced the carbon nanotube electron beam (C-beam) exposure technic using triode structure. As a source, the electron beam emit from CNT emitters placed at the cathode by high electric field. Through the gate mesh, with high accelerating energy, the electron can be extracted easily and impact at the anode plate. For thin film modification, after the C-beam exposure on the amorphous silicon thin film, we found phase changes and it showed a high crystallinity from the Raman measurement. We expect that this crystallized film will be a good candidate as a new active layer of TFT.