Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2014.11a
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- Pages.293-293
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- 2014
Controlled Plasma Treatment for Edge Contacts of Graphene
그래핀의 엣지 접합 (Edge Contact)을 위한 플라즈마 처리 연구
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- 유원종 (성균관대학교 나노과학기술학과)
- Published : 2014.11.20
Abstract
The applicability of graphene has been demonstrated in the electronic fields. But, high performance of graphene is limited by the contact resistance (Rc) at the metal-graphene interface. Recently, Rc was found to be improved by forming edge-contacted graphene via theoretical simulation. Based on the differences between the surface and edge contacts at the M-G interface, we demonstrate "edge-contacted" graphene through the use of a controlled plasma processing technique that generates the edge structure of the bond and significantly reduces the contact resistance. The contact resistance attained by using pre-plasma processing was of
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