Proceedings of the KIPE Conference (전력전자학회:학술대회논문집)
- 2014.11a
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- Pages.85-86
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- 2014
Single-phase Resonant Inverter using SiC Power Modules for a Compact High-Voltage Capacitive Coupled Plasma Power Supply
- Tu, Vo Nguyen Qui (Department of Research and Development, Dawonsys) ;
- Choi, Hyunchul (Department of Research and Development, Dawonsys) ;
- Kim, Youngwoo (Department of Research and Development, Dawonsys) ;
- Lee, Changhee (Department of Research and Development, Dawonsys) ;
- Yoo, Hyoyol (Department of Research and Development, Dawonsys)
- Published : 2014.11.28
Abstract
The paper presents a power supply of atmospheric-pressure plasma reactor based on SiC (Silicon Carbide) MOSFET resonant inverter. Thanks to the capacitive characteristic of capacitive coupling plasma reactor type, the LC series resonant inverter had been applied to take advantages of this topology with the implementation of SiC MOSFET power modules as switching power devices. Designation of gate driver for SiC MOSFET had been introduced by this paper. The 5kVp, 5kW power supply had also been verified by experimental results.