한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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- Pages.437-437
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- 2014
Physico-Chemical Properties of Various Oxide Nanoparticles Synthesized with Electron Beam Irradiation System
초록
Various oxide particles are synthesized in an ambient condition using an electron beam irradiation system. The formation of oxide particles is confirmed by FT-IR spectra results and the X-ray photoelectron spectrum. It is also shown that the morphology and size of oxide particles are significantly influenced by the type and flowrate of dilution gas. The energy dispersive X-ray (EDX) analysis also confirms that various oxide particles are synthesized.