한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
- /
- Pages.296-296
- /
- 2014
Splitting of Surface Plasmon Resonance Peaks Under TE- and TM-polarized Illumination
- Yoon, Su-Jin (Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
- Hwang, Jeongwoo (Photonic-Bio Research center, Korea photonics Technology Institute) ;
- Lee, Myeong-Ju (Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
-
Kang, Sang-Woo
(Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
-
Kim, Jong-Su
(Department of Physics, Yeungnam University) ;
- Ku, Zahyun (Air Force Research Laboratory, Wright-Patterson Air Force Base) ;
- Urbas, Augustine (Air Force Research Laboratory, Wright-Patterson Air Force Base) ;
-
Lee, Sang Jun
(Division of Industrial Metrology, Korea Research Institute of Standards and Science)
- 발행 : 2014.02.10
초록
We investigate experimentally and theoretically the splitting of surface plasmon (SP) resonance peaks under TE- and TM-polarized illumination. The SP structure at infrared wavelength is fabricated with a 2-dimensional square periodic array of circular holes penetrating through Au (gold) film. In brief, the processing steps to fabricate the SP structure are as follows. (i) A standard optical lithography was performed to produce to a periodic array of photoresist (PR) circular cylinders. (ii) After the PR pattern, e-beam evaporation was used to deposit a 50-nm thick layer of Au. (iii) A lift-off processing with acetone to remove the PR layer, leading to final structure (pitch,
키워드