Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
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- Pages.272-272
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- 2014
NH3 Sensing Properties of SnO Thin Film Deposited by RF Magnetron Sputtering
- Vu, Xuan Hien (School of Materials Science and Engineering, Kyungpook National University) ;
- Lee, Joon-Hyung (School of Materials Science and Engineering, Kyungpook National University) ;
- Kim, Jeong-Joo (School of Materials Science and Engineering, Kyungpook National University) ;
- Heo, Young-Woo (School of Materials Science and Engineering, Kyungpook National University)
- Published : 2014.02.10
Abstract
SnO thin films, 100 nm in thickness, were deposited on glass substrates by RF magnetron sputtering. A stack structure of