한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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- Pages.217.2-217.2
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- 2014
Flexible and Transparent CuO/Cu/CuO Electrodes Grown on Flexible PET Substrate by Continuous Roll-to-roll Sputtering for Touch Screen Panels Cells
- Kim, Dong-Ju (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University) ;
- Kim, Han-Ki (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University)
- 발행 : 2014.02.10
초록
We prepared a flexible and transparent CuO/Cu/CuO multilayer electrodes on a polyethylene terephthalate (PET) substrate using a specially designed roll-to-roll sputtering system at room temperature for GFF-type touch screen panels (TSPs). By the continuous roll-to-roll sputtering of the CuO and Cu layer, we fabricated a flexible CuO(150nm)/Cu(150nm)/CuO(150nm) multilayer electrodes with a sheet resistance of