한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
- /
- Pages.195.2-195.2
- /
- 2014
Structural Modification of Nanodiamond Induced by Ion Irradiation
초록
Nanodiamond (ND) is composed of inner diamond core and outer graphite shell. The size of ND used in this study was about 5 nm. The ND solution was dropped on silicon substrate and dried in air. Dried ND sample was purified by using annealing method in air. Then, 40 keV Fe ion was irradiated into the sample. The dose was varied from