한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2013년도 춘계학술대회 논문집
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- Pages.209-210
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- 2013
Tribological properties and thermal stability of TiAlCN coatings deposited by ICP-assisted sputtering
- Choe, Han Joo (Department of Materials Science and Engineering, Seoul National University) ;
- Kwon, Soon-Ho (Department of Materials Science and Engineering, Seoul National University) ;
- Lee, Jung-Joong (Department of Materials Science and Engineering, Seoul National University)
- 발행 : 2013.05.30
초록
In this study, the tribological and thermal properties of TiAlCN coatings were investigated to evaluate their feasibility in automobile applications. TiAlCN coatings with carbon compositions between 25 and 65 at.% were prepared by inductively coupled plasma (ICP) assisted sputtering and were annealed at 400, 500, and
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