한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)

한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

Tribological properties and thermal stability of TiAlCN coatings deposited by ICP-assisted sputtering

  • Choe, Han Joo (Department of Materials Science and Engineering, Seoul National University) ;
  • Kwon, Soon-Ho (Department of Materials Science and Engineering, Seoul National University) ;
  • Lee, Jung-Joong (Department of Materials Science and Engineering, Seoul National University)
  • 발행 : 2013.05.30
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초록

In this study, the tribological and thermal properties of TiAlCN coatings were investigated to evaluate their feasibility in automobile applications. TiAlCN coatings with carbon compositions between 25 and 65 at.% were prepared by inductively coupled plasma (ICP) assisted sputtering and were annealed at 400, 500, and $600^{\circ}C$ in air.

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