Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
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Tribological properties and thermal stability of TiAlCN coatings deposited by ICP-assisted sputtering

  • Choe, Han Joo (Department of Materials Science and Engineering, Seoul National University) ;
  • Kwon, Soon-Ho (Department of Materials Science and Engineering, Seoul National University) ;
  • Lee, Jung-Joong (Department of Materials Science and Engineering, Seoul National University)
  • Published : 2013.05.30
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Abstract

In this study, the tribological and thermal properties of TiAlCN coatings were investigated to evaluate their feasibility in automobile applications. TiAlCN coatings with carbon compositions between 25 and 65 at.% were prepared by inductively coupled plasma (ICP) assisted sputtering and were annealed at 400, 500, and $600^{\circ}C$ in air.

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