한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2013년도 춘계학술대회 논문집
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- Pages.162-163
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- 2013
The growth of superlattice IGZO thin films using ZnO buffer layer grown by thermal atomic layer deposition
- Jo, Seong-Un (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Jo, Hyeong-Gyun (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
- 발행 : 2013.05.30
초록
Single-crystal InGaZnO (IGZO) thin films were spontaneously formed as periodic layered structure along the c-axis by thermal treatment at high temperature. when the IGZO superlattice were synthesized by sol-gel method, the effects of preferred growth orientations and the flatness of ZnO buffer layer were investigated.
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