Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2013.05a
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- Pages.162-163
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- 2013
The growth of superlattice IGZO thin films using ZnO buffer layer grown by thermal atomic layer deposition
- Jo, Seong-Un (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
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Jo, Hyeong-Gyun
(School of Advanced Materials Science and Engineering, Sungkyunkwan University)
- Published : 2013.05.30
Abstract
Single-crystal InGaZnO (IGZO) thin films were spontaneously formed as periodic layered structure along the c-axis by thermal treatment at high temperature. when the IGZO superlattice were synthesized by sol-gel method, the effects of preferred growth orientations and the flatness of ZnO buffer layer were investigated.
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