Semiconductor Engineering

산화물반도체 트랜지스터의 전기적인 특성

The research was observed the characteristic of ZnO based oxide semiconductors for the transparent conducting display. The optical-physical properties of ZnO based oxide semiconductors) grown on p-Si wafer were presented. ZnO based oxide semiconductors was prepared by the RF magnetron sputtering system. The characteristic of ZnO based oxide semiconductorswas strongly influenced by the amount of localized electron state by the defects. The PL spectra moved to long wave number with increasing the defects in the film. The mobility of a-IGZO film was increased with increasing the oxygen gas flow rate. The resistivity of ZnO based oxide semiconductors was also related to the mobility of ZnO based oxide semiconductors, and the mobility increased at the sample with low resistivity. The electric characteristic of a-IGZO TFTs showed that it is an n-type semiconductor.

본 논문에서는 투명디스플레이를 구현하기 위해 가장 주목받는 ZnO 계열의 산화물반도체의 특성에 대하여 관찰하였다. 알에프 마그네트론 스퍼터링에 의해 증착된 산화물 반도체의 광학적 특성으로부터 전기적인 신호 동작특성의 상호관계를 알아보았다. 박막내의 결합 혹은 불순물이 증가할수록 PL 특성은 장파장 특성이 우세하게 나타났다. SiOC 박막위에서는 에너지 밴드갭이 증가하면서 단파장 특성이 우세하게 나타났다. 트랜지스터의 특성은 기판의 의존도가 높게 나타났다.