Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2013.05a
- /
- Pages.641-642
- /
- 2013
- /
- 2005-8446(pISSN)
Slit Sizes In The Optical System To Prevent Overlpa In The Color Filter Aligner
Color Filter 노광기 Pattern Overlap 예방을 위한 Slit Size 최적화
- Published : 2013.05.29