한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.699-700
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- 2013
Thermal Stability of Hydrogen Doped AZO Thin Films Prepared by r.f. Magnetron Sputtering
- 박용섭 (조선이공대학) ;
-
이수호
(성균관대학교) ;
- 김중규 (성균관대학교) ;
- 하종찬 (성균관대학교) ;
-
홍병유
(성균관대학교) ;
-
이준신
(성균관대학교) ;
- 이재형 (성균관대학교)
- Park, Yong-Seop ;
-
Lee, Su-Ho
;
- Kim, Jung-Gyu ;
- Ha, Jong-Chan ;
-
Hong, Byeong-Yu
;
-
Lee, Jun-Sin
;
- Lee, Jae-Hyeong
- 발행 : 2013.02.18
초록
Aluminum and hydrogen doped zinc oxide (AZHO) films were prepared by r.f. magnetron sputtering. The structural, electrical, and optical properties of the AHZO films were investigated in terms of the annealing conditions to study the thermal stability. The XRD measurements revealed that the degree of c-axis orientation was decreased and the crystallintiy of the films was deteriorated by the heat treatment. The electrical resistivity was significantly increased when the films were annealed at higher temperature. Although the optical transmittance of AHZO films didn't highly changed by heat treatment, the optical band gap was reduced, regardless of annealing temperature and duration. The thermal stability of AHZO films was worse compared to AZO films.
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