한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.619-619
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- 2013
In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Atomic Layer Deposition of $Ta_2O_5$ film on Si Substrate with Ta(NtBu)(dmamp)$_2Me$ and $H_2O$
- Lee, Seung Youb (BK21 Physics Research Division, Sungkyunkwan University) ;
- Jung, Woosung (BK21 Physics Research Division, Sungkyunkwan University) ;
- Kim, Yooseok (BK21 Physics Research Division, Sungkyunkwan University) ;
- Kim, Seok Hwan (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
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An, Ki-Seok
(Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
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Park, Chong-Yun
(BK21 Physics Research Division, Sungkyunkwan University)
- 발행 : 2013.02.18
초록
The interfacial state between
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