한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.544-545
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- 2013
Surface Modification with Atmospheric Microwave Agron Plasma Jet Assisted with Admixture of H2O2 and Analysis of Plasma Characteristics
- Won, I.H. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Shin, H.K. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Kwon, H.C. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Kim, H.Y. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Kang, S.K. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Lee, J.K. (Department of Electrical Engineering, Pohang University of Science and Technology)
- 발행 : 2013.02.18
초록
Recently, low-temperature atmospheric-pressure plasmas have been investigated [1,2] for biomedical applications and surface treatments. Experiments for improving hydrophilicity of stainless steel (SUS 304) plate with atmospheric microwave argon and H2O2 mixture plasma jet [3] were carried out and experimental measurements and plasma simulations were conducted for investigating the characteristics of plasma for the process. After 30 s of low power (under 10 W) and low temperature (under