Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Transparent Conducting Nanodomes for Efficient Light Management

  • Hong, Seung-Hyouk (Department of Electrical Engineering, Kunsan National University) ;
  • Yun, Ju-Hyung (Department of Electrical Engineering, University at Buffalo, State University of New York) ;
  • Park, Hyeong-Ho (Patterning Process Department, Nano Process Division, Korea Advanced Nano Fab Center (KANC)) ;
  • Kim, Joondong (Department of Electrical Engineering, Kunsan National University)
  • Published : 2013.08.21
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Abstract

Transparent conducting nanoscale-domes were periodically patterned on a Si substrate by nanoimprint method. Transparent conductor of indium-tin-oxide (ITO) was shaped as a nanodome, which effectively drives the incident light effectively into a light-absorber and therefore induces a substantially enhanced photo-response. An ITO nanodome is electrically isolated from the neighboring nanodomes. This structure benefits to provide a low contact between a Si substrate and a front metal electrode giving an efficient electrical path. The ITO nanodome device showed a significantly enhanced photo-response of 6010 from the value of 72.9 of a planar ITO film. The electrical and optical advantage of an ITO nanodome is suitable for various photoelectric applications.

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