Si-nanoplate Transistors for Flexible Electronics

Sub 10-nm thick of Si plate is simulated with the software for Nanowire Field Effect Transistor (FET) device simulation. With usual single crystal Si technology, it is difficult to realize flexible electronic devices. Here, we suggest a FET device based on thinned Si layer. The simulation implied a practical limitation of the Si plate thickness for flexible devices as 2 nm. With around this thickness, Si plate may have much flexibility than existing bulk MOSFETs.