Effect of substrates on the geometries of as-grown carbon coils

Carbon coils could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under thermal chemical vapor deposition system. The substrate with oxygen incorporation and the substrate without oxygen incorporation were employed to elucidate the effect of substrate on the formation of carbon coils. The characteristics (formation densities, morphologies, and geometries) of the deposited carbon coils on the substrate were investigated. In case of Si substrate, the microsized carbon coils were dominant on the substrate surface. While, in case of oxygen incorporated substrate, the nanosized carbon coils were prevail on the substrate surface. The cause for the different geometry formation of carbon coils according to the different substrates was discussed in association with the different thermal expansion coefficient values between the substrate with oxygen incorporation and the substrate without oxygen incorporation.