수중 환경에서 수소로 희석된 반응 가스를 이용하여 증착된 DLC 박막의 트라이볼로지 거동

Tribological Behaviors of DLC Thin Films Deposited using Precursor Gas diluted by Hydrogen under Aqueous Environment

This study examined the friction and wear behavior of diamond-like carbon (DLC) films deposited from a radio frequency glow discharge using a hydrogen diluted benzene gas mixture. The DLC films were deposited on Si (100) and polished stainless steel substrates by r.f.-PACVD at hydrogen to benzene ratios, or the hydrogen dilution ratio, ranging from 0 to 2.0. The wear test was carried out in both ambient and aqueous environments using a home-made ball-on-disk type wear rig. The stability of the DLC coating in an aqueous environment was improved by diluting the benzene precursor gas with hydrogen, suggesting that hydrogen dilution during the deposition of DLC films suppress the initiation of defects in the film and improved the adhesion of the coating to the interface.