한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2012년도 춘계학술발표회 논문집
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- Pages.128-128
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- 2012
Anode Layer Linear Ion Source for Roll-to-Roll Process
- Kim, Do-Geun (Korea Institute of Materials Science) ;
- Lee, Seunghun (Korea Institute of Materials Science) ;
- Kim, Jong-Kuk (Korea Institute of Materials Science)
- 발행 : 2012.05.31
초록
Korea institute of materials science (KIMS) has researched an anode layer linear ion source (ALIS) for various roll-to-roll treatment processes. The ALIS can be used to Ar ion beam (1~2 keV) treatment, and diamond-like carbon coating and so on. The treatment width of ALIS is 500 mm with a uniformity below 5 % (=(Max-min)/(Max+min)). We also demonstrate the status of development of ALIS in a roll-to-roll industry.
키워드