한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2012년도 춘계학술발표회 논문집
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- Pages.124-125
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- 2012
Roll-to-Roll Barrier Coatings on PET Film by Using a Closed Drift Magnetron Plasma Enhanced Chemical Vapor Deposition
- Lee, Seunghun (Korea Institute of Materials Science) ;
- Kim, Jong-Kuk (Korea Institute of Materials Science) ;
- Kim, Do-Geun (Korea Institute of Materials Science)
- 발행 : 2012.05.31
초록
Korea institute of materials science (KIMS) use a linear deposition source called as a closed drift linear plasma source (CDLPS) as well as dual magnetron sputtering (DMS) to deposit SiOxCyHz films in
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