Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2012.05a
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  • Pages.617-618
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  • 2012
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  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Design of MR Damper for Tiny Vibration Control of Semiconductor Equipment

반도체 장비의 미세진동제어를 위한 MR 댐퍼의 설계

  • Published : 2012.05.30
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Abstract

Keywords