한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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- Pages.418-418
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- 2012
Electrostatic Charging and Substrate Seeding in Gas Phase Synthesis of Nanocrystalline Diamond Powder
- Cho, Jung-Min (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Lee, Hak-Joo (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Choi, Heon-Jin (Department of Materials Science and Engineering, Yonsei University) ;
- Lee, Wook-Seong (Electronic Materials Center, Korea Institute of Science and Technology)
- 발행 : 2012.08.20
초록
Synthesis of nanocrystalline diamond powder was investigated via a gas-to-particle scheme using the hot filament chemical vapor deposition. Effect of substrate surface seeding by nano diamond powder, and that of the electrical conductance of the substrate were studied. The substrate temperature, methane content in the precursor gas, filament-substrate distance and filament temperature were
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