한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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- Pages.193-193
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- 2012
Interface Control to get Higher Efficiency in a-Si:H Solar Cell
- Han, Seung-Hee (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology) ;
- Kim, En-Kyeom (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology) ;
- Park, Won-Woong (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology) ;
- Moon, Sun-Woo (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology) ;
- Kim, Kyung-Hun (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology) ;
- Kim, Sung-Min (Photo-electronic Hybrids Research Center, National Agenda Research Division Korea Institute of Science and Technology)
- 발행 : 2012.08.20
초록
In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or