Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.08a
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- Pages.141-141
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- 2012
The Effect of Gas Environment on the Electronic and Optical Properties of Amorphous Indium Zinc Tin Oxide Thin Films
- Denny, Yus Rama (Department of Physics, Chungbuk National University) ;
- Lee, Sun-Young (Department of Physics, Chungbuk National University) ;
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Lee, Kang-Il
(Department of Physics, Chungbuk National University) ;
- Seo, Soon-Joo (Department of Physics, Chungbuk National University) ;
- Oh, Suhk-Kun (Department of Physics, Chungbuk National University) ;
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Kang, Hee-Jae
(Department of Physics, Chungbuk National University) ;
- Heo, Sung (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
- Chung, Jae-Gwan (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
- Lee, Jae-Cheol (Analytical Engineering Center, Samsung Advanced Institute of Technology) ;
- Tougaard, Seven (Department of Physics and Chemistry, University of Southern Denmark)
- Published : 2012.08.20
Abstract
The electronic and optical properties of Indium Zinc Tin Oxide (IZTO) thin films using gas environment were investigated by X-ray photoelectron spectroscopy (XPS) and reflection electron energy loss spectroscopy (REELS). REELS spectra revealed that the band gaps of IZTO thin films are 3.26, 3.07, and 3.46 eV for water mixed with oxygen, argon mixed with oxygen, and air environments, respectively. The measured band gaps by REELS are consistent with the optical band gaps obtained by UV-Spectrometer. The optical properties represented by the dielectric function