한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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- Pages.457-457
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- 2012
Study on Improvement of Diamond Deposition on Al2O3 Ceramic Substrates by a DC Arc Plasmatron
- Kang, In-Je (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Joa, Sang-Beom (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Chun, Se-Min (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Lee, Heon-Ju (Department of Nuclear & Energy Engineering, Jeju National University)
- 발행 : 2012.02.08
초록
We presented plasma processing using a DC Arc Plasmatron for diamond deposition on Al2O3 ceramic substrates. Plasma surface treatments were conducted to improve deposition condition before processing for diamond deposition. The Al2O3 ceramic substrates deposited,