Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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- Pages.421-421
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- 2012
Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition
초록
Graphene has drawn enormous attention owing to its outstanding properties, such as high charge mobility, excellent transparence and mechanical property. Synthesis of Graphene by chemical vapor deposition (CVD) is an attractive way to produce large-scale Graphene on various substrates. However the fatal limitation of CVD process is high temperature requirement(around