한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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- Pages.388-388
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- 2012
Memory Characteristics of High Density Self-assembled FePt Nano-dots Floating Gate with High-k $Al_2O_3$ Blocking Oxide
- Lee, Gae-Hun (Department of Nano Semiconductor Engineering, Hanyang University) ;
- Lee, Jung-Min (Department of Nano Semiconductor Engineering, Hanyang University) ;
- Yang, Hyung-Jun (Department of Nano Semiconductor Engineering, Hanyang University) ;
- Kim, Kyoung-Rok (Department of Nano Semiconductor Engineering, Hanyang University) ;
- Song, Yun-Heub (Department of Nano Semiconductor Engineering, Hanyang University)
- 발행 : 2012.02.08
초록
In this letter, We have investigated cell characteristics of the alloy FePt-NDs charge trapping memory capacitors with high-k