Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2012.04a
- /
- Pages.212-213
- /
- 2012
- /
- 1598-2548(pISSN)
Robust optimization control of two-axes precise stage
2축 정밀 스테이지의 강인 최적 제어
- Published : 2012.04.26
Abstract
Keywords