Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2011.05a
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- Pages.264-266
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- 2011
Film Structure Modification in Conventional and Pulsed Dc Magnetron Sputtering
- Kusano, Eiji (Advanced Materials Science Research Center Kanazawa Institute of Technology)
- Published : 2011.05.19
Abstract
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