한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
- /
- Pages.171-171
- /
- 2011
Characteristic and moisture permeability of SiOxCy thin film synthesized by Atmospheric pressure-plasma enhanced chemical vapor deposition
- Oh, Seung-Chun (Institute for Advanced Engineering) ;
- Kim, Sang-Sik (Institute for Advanced Engineering) ;
- Shin, Jung-Uk (Institute for Advanced Engineering)
- 발행 : 2011.05.19
초록
Atmospheric pressure- plasma enhanced chemical vapor deposition(AP-PECVD)Processes are recognized as promising and cost effective methods for wide-area coating on sheets of steel, glass, polymeric web, etc. In this study,