Test Results of Pulsed Power Supply for Nonthermal Plasma Process

저온 플라즈마 공정용 펄스발생 전원장치의 성능시험

The application of a pulsed power system is being extended to an environmental and industrial field. The non-destructive gaseous pollutants from industrial plants such as power generation plants and incinerators can be processed by applying high voltage pulses with a fast rising time (a few nanoseconds) and short duration (nano to microseconds) in a pulsed corona discharge reactor. The pulsed plasma generator with a triggered switch has been developed. Its corona current in load can be adjusted by applied voltage and repetition rate. We investigated the performance of the pulsed plasma generator by analyzing the concentration of ozone in small reactor. This paper describes the electrical characteristics of the pulse generator with a voltage of 30 kV at repetition rate of 50 PPS. In addition, we briefly discuss a configuration of the system and initial test results.